The pH-sensing properties of tantalum pentoxide films fabricated by metal organic low pressure chemical vapor deposition

Methods of isfet fabrication

Tadayuki Matsuo, M. Esashi · Sensors and Actuators · 1981 · 343 citations

Engineering, Electrical Engineering, Microfabrication +10

UV-O/sub 3/ and dry-O/sub 2/: Two-step-annealed chemical vapor-deposited Ta/sub 2/O/sub 5/ films for storage dielectrics of 64-Mb DRAMs

H. Shinriki, Masami Nakata · IEEE Transactions on Electron Devices · 1991 · 205 citations

Natural Sciences, Materials Engineering, Materials Science +17

Comparison of the hysteresis of Ta2O5 and Si3N4 pH-sensing insulators

Luc Bousse, Shahriar Mostarshed, B. van der Schoot et al. · Sensors and Actuators B Chemical · 1994 · 180 citations

Engineering, Materials Engineering, Materials Science +9

Some properties of crystallized tantalum pentoxide thin films on silicon

G. S. Oehrlein, F. M. d’Heurle, Arnold Reisman · Journal of Applied Physics · 1984 · 103 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of oxide additions on the polymorphism of tantalum pentoxide. IV. The system Ta2O5Ta2WO8

R.S. Roth, J.L. Waring, H.S. Parker · Journal of Solid State Chemistry · 1970 · 84 citations

Natural Sciences, Materials Engineering, Materials Science +12