Applied Surface Science · 1998 · 14 citations · 23 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSpectroscopyAuger Electron SpectroscopyPhotoelectron SpectroscopySemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesAuger Electron Spectroscopy QuantificationAuger Line Shape AnalysisOxidation KineticsRapid Thermal OxidationSemiconductor Oxidation
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Larry G. Blackwood, Edmund R. Malinowski · Technometrics · 1994 · 2.2K citations
GaAs Oxidation and the Ga‐As‐O Equilibrium Phase Diagram
C. D. Thurmond, G. P. Schwartz, G. W. Kammlott et al. · Journal of The Electrochemical Society · 1980 · 199 citations