Concepedia

Formation of microcircuits in microelectronics by electroless deposition

Teimuraz Khoperia, T.J. Tabatadze, T.I. Zedgenidze

Electrochimica Acta · 1997 · 43 citations · 1 references

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Concepts

References

Concepts

EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsMicrofabricationSemiconductor DevicesElectroless PlatingIntegrated Circuit FabricationInterconnect FormationMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesElectroless DepositionInterconnect Fabrication

References

1

Selective Electroless Metal Deposition for Via Hole Filling in VLSI Multilevel Interconnection Structures

C. H. Ting, Milan Paunović, P.-L. Pai et al. · Journal of The Electrochemical Society · 1989 · 72 citations

Engineering, Materials Engineering, Materials Science +17