CVD growth of 3C-SiC on SOI (100) substrates with optimized interface structure

State of the art of 3C-SiC/silicon on insulators

J. Camassel · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 36 citations

Engineering, Materials Engineering, Materials Science +17

Prevention of micropipes and voids at β-SiC/Si(100) interfaces

Roland W. Scholz, U. Gösele, Frank Wischmeyer et al. · Applied Physics A · 1998 · 31 citations

Engineering, Materials Engineering, Materials Science +10

High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines

J. von Berg, R. Ziermann, W. Reichert et al. · Materials science forum · 1998 · 16 citations · Full text

Engineering, Materials Engineering, Materials Science +12