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High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines

J. von Berg, R. Ziermann, W. Reichert, Martin Eickhoff, G. Krötz, U. Thoma, Th. Boltshauser, C. Cavalloni, J.P. Nendza

Materials science forum · 1998 · 16 citations · 0 references

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