J. von Berg

A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates

Martin Eickhoff, H.J. Möller, G. Kroetz et al. · Sensors and Actuators A Physical · 1999 · 58 citations

Materials Science, Cubic Silicon Carbide, Engineering +10

A high temperature pressure sensor with β-SiC piezoresistors on SOI substrates

R. Ziermann, J. von Berg, W. Reichert et al. · 2002 · 41 citations

Materials Science, Single Crystalline, Electrical Engineering +15

High temperature piezoresistive β-SiC-on-SOI pressure sensor with on chip SiC thermistor

R. Ziermann, J. von Berg, Frank Wischmeyer et al. · Materials Science and Engineering B · 1999 · 33 citations

Electrical Engineering, Chip Sic Thermistor, Engineering +6

High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines

J. von Berg, R. Ziermann, W. Reichert et al. · Materials science forum · 1998 · 16 citations · Full text

Combustion Engines, Engineering, Sensors +5

Measurement of the cylinder pressure in combustion engines with a piezoresistive β-SiC-on-SOI pressure sensor

J. von Berg, R. Ziermann, W. Reichert et al. · 2002 · 13 citations

Cylinder Pressure, Combustion Engines, Engineering +13