G. Kroetz

Silicon compatible materials for harsh environment sensors

G. Kroetz, Martin Eickhoff, H. Moeller · Sensors and Actuators A Physical · 1999 · 98 citations

Materials Science, Silicon Compatible Materials, Engineering +5

A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates

Martin Eickhoff, H.J. Möller, G. Kroetz et al. · Sensors and Actuators A Physical · 1999 · 58 citations

Materials Science, Cubic Silicon Carbide, Engineering +10

Piezoresistive properties of single crystalline, polycrystalline, and nanocrystalline n-type 3C-SiC

Martin Eickhoff, Martin Möller, G. Kroetz et al. · Journal of Applied Physics · 2004 · 40 citations

Materials Science, Semiconductors, Single Crystalline +12

Influence of crystal quality on the electronic properties of <i>n</i>-type 3C-SiC grown by low temperature low pressure chemical vapor deposition

Martin Eickhoff, H.J. Möller, J. Stoëmenos et al. · Journal of Applied Physics · 2004 · 26 citations

Materials Science, Layer Thickness, Engineering +11

Selective growth of high-quality 3C-SiC using a SiO 2 sacrificial-layer technique

Martin Eickhoff, H.J. Möller, M. Rapp et al. · Thin Solid Films · 1999 · 18 citations

Materials Engineering, Sio 2, Electrical Engineering +10