Aluminum Nitride piezo-MEMS on polyimide flexible substrates

Piezoelectric Ribbons Printed onto Rubber for Flexible Energy Conversion

Yi Qi, Noah T. Jafferis, Kenneth P. Lyons et al. · Nano Letters · 2010 · 492 citations

Engineering, Materials Engineering, Materials Science +17

Recent Developments in Polymer MEMS

C. Liu · Advanced Materials · 2007 · 418 citations

Engineering, Materials Engineering, Materials Science +17

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Preparation of Oriented Aluminum Nitride Thin Films on Polyimide Films and Piezoelectric Response with High Thermal Stability and Flexibility

Morito Akiyama, Yukari Morofuji, Toshihiro Kamohara et al. · Advanced Functional Materials · 2007 · 74 citations

Natural Sciences, Materials Engineering, Materials Science +14

Piezoelectric actuation of microbridges using AlN

J. Olivares, E. Iborra, M. Clément et al. · Sensors and Actuators A Physical · 2005 · 60 citations

Engineering, Materials Engineering, Materials Science +12