High-speed atomic force microscope lithography using a piezo tube scanner driven by a sinusoidal waveform

Pushing the limits of lithography

Takashi Ito, Shinji Okazaki · Nature · 2000 · 884 citations

Engineering, Materials Science, Microfabrication +8

Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air

John A. Dagata, J. Schneir, H. H. Harary et al. · Applied Physics Letters · 1990 · 733 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

D. Croft, G. Shed, Santosh Devasia · Journal of Dynamic Systems Measurement and Control · 1999 · 714 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15

Components for high speed atomic force microscopy

Georg E. Fantner, Georg Schitter, Johannes H. Kindt et al. · Ultramicroscopy · 2006 · 237 citations · Full text

Natural Sciences, Materials Science, Physics +9

Breaking the speed limit with atomic force microscopy

Loren Picco, Laurent Bozec, Artūras Ulčinas et al. · Nanotechnology · 2006 · 230 citations

Natural Sciences, Biophysics, Materials Science +14