First investigation of metal–insulator–metal (MIM) capacitor using Pr2O3 dielectrics

Analog characteristics of metal-insulator-metal capacitors using PECVD nitride dielectrics

J.A. Babcock, S. Balster, A. Pinto et al. · IEEE Electron Device Letters · 2001 · 179 citations

Engineering, Electrical Engineering, Analog Electronics +12

High-density MIM capacitors using Al₂O₃ and AlTiO_x dielectrics

S.B. Chen, Chyong‐Huey Lai, Albert Chin et al. · IEEE Electron Device Letters · 2002 · 168 citations

Engineering, Electrical Engineering, Materials Science +12

Effect of hygroscopic nature on the electrical characteristics of lanthanide oxides (Pr2O3, Sm2O3, Gd2O3, and Dy2O3)

Sanghun Jeon, Hyunsang Hwang · Journal of Applied Physics · 2003 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +16

Atomic layer deposition of ZrO2 on W for metal–insulator–metal capacitor application

Sang‐Yun Lee, Hyoungsub Kim, Paul C. McIntyre et al. · Applied Physics Letters · 2003 · 134 citations

Natural Sciences, Materials Engineering, Materials Science +17

A high performance MIM capacitor using HfO₂ dielectrics

Hang Hu, Chunxiang Zhu, Yongfeng Lu et al. · IEEE Electron Device Letters · 2002 · 131 citations

Engineering, Electrical Engineering, Materials Science +17