Future of microelectromechanical systems (MEMS)

A gas chromatographic air analyzer fabricated on a silicon wafer

S.C. Terry, J.H. Jerman, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 1.4K citations

Chemical Engineering, Air Sampling, Engineering +14

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 486 citations

Electrical Engineering, Engineering, Soft Robotics +10

Integrated movable micromechanical structures for sensors and actuators

L.-S. Fan, R.S. Muller · IEEE Transactions on Electron Devices · 1988 · 295 citations

Movable Micromechanical Structures, Engineering, Mechanical Engineering +18

A surface micromachined silicon accelerometer with on-chip detection circuitry

Wolfgang Kuehnel, Steven Sherman · Sensors and Actuators A Physical · 1994 · 232 citations

Electrical Engineering, Engineering, Accelerometer +5

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

E.H. Klaassen, K. Petersen, J.M. Noworolski et al. · Sensors and Actuators A Physical · 1996 · 192 citations

Materials Science, Materials Engineering, Ion Implantation +12