Cones formed during sputtering of InP and their use in defining AFM tip shapes

Cone formation as a result of whisker growth on ion bombarded metal surfaces

G. K. Wehner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 162 citations

Natural Sciences, Materials Science, Physics +12

Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development

Scott MacLaren, J. E. Baker, N. Finnegan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 148 citations

Natural Sciences, Materials Science, Physics +17

Sputtering of compound semiconductor surfaces. I. Ion-solid interactions and sputtering yields

J.B. Malherbe · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1994 · 92 citations

Natural Sciences, Materials Science, Electronic Materials +15

Sputtering of compound semiconductor surfaces. II. Compositional changes and radiation-induced topography and damage

J.B. Malherbe · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1994 · 66 citations

Engineering, Materials Engineering, Materials Science +16

Auger electron spectroscopy depth profiling during sample rotation

A. Zalar · Surface and Interface Analysis · 1986 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +17