11
Publications
362
Citations
11
H-Index
1982
Active since
N. Finnegan is an author at University of Illinois Urbana-Champaign specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface ScienceChemistryThin FilmsNanotechnologyCrystalline DefectsChemical EngineeringPhysics
Publications per year
1982–2004
11
11
Scott MacLaren, J. E. Baker, N. Finnegan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 148 citations
Engineering, Surface Roughness Development, Causes Indium Enrichment +17
Characterization of CrBN films deposited by ion beam assisted deposition
Samir Aouadi, F. Namavar, Eric Tobin et al. · Journal of Applied Physics · 2002 · 30 citations
Daniel Gall, Richard T. Haasch, N. Finnegan et al. · Surface Science Spectra · 2000 · 29 citations
Materials Science, Inorganic Chemistry, Preferential Sputtering +15
Rows per page
1–5 of 11