Concepedia

Publication | Closed Access

Fabrication of an hermetically packaged silicon resonator on LTCC substrate

DOI

35

Citations

20

References

2012

Year

Nguyễn Văn Toàn, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Microsystem Technologies

References

YearCitations

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