Concepedia

Publication | Closed Access

Nanoscale TiN metal gate technology for CMOS integration

DOI

40

Citations

7

References

2006

Year

Max C. Lemme, J.K. Efavi, T. Mollenhauer, M. Schmidt, H.D.B. Gottlob, T. Wahlbrink, H. Kurz
Microelectronic Engineering

References

YearCitations

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