Concepedia

Jinghao Chen

JC

2

Publications

105

Citations

2

H-Index

2004

Active since

Affiliations

National University of Singapore(Current)

Jinghao Chen is an author at National University of Singapore specializing in engineering, electrical insulation, and applied physics.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceChemical EngineeringElectronic MaterialsElectrical Insulation

Publications per year

2004–2005

2

Publications

2

Investigation of etching properties of metal nitride/high-k gate stacks using inductively coupled plasma

Wan Sik Hwang, Jinghao Chen, Won Jong Yoo et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 57 citations

Investigation of etching properties of HfO based high-<i>K</i>dielectrics using inductively coupled plasma

Jinghao Chen, Won Jong Yoo, Zerlinda Tan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 48 citations

Materials Science, Chemical Engineering, Plasma Electronics +15

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