High textured AlN thin films grown by RF magnetron sputtering; composition, structure, morphology and hardness - Concepedia

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High textured AlN thin films grown by RF magnetron sputtering; composition, structure, morphology and hardness

53

Citations

15

References

2004

Year

I. C. Oliveira, K. G. Grigorov, Homero Santiago Maciel, M. Massi, C. Otani

Materials EngineeringMaterials ScienceMagnetismMaterial AnalysisEngineeringAluminium NitrideSurface ScienceApplied PhysicsRf Magnetron SputteringMagnetic Thin FilmsThin FilmsMagnetic MaterialAln Thin FilmsThin Film Processing

References

	Year	Citations

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