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EngineeringMaterials EngineeringMechanical EngineeringElectrochemistryMicroelectromechanical SystemsMicrofabricationMems FabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsElectroosmotic FlowMicroelectromechanical System FabricationMicropumps
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Peter Gravesen, J. Branebjerg, O S Jensen · Journal of Micromechanics and Microengineering · 1993 · 1K citations