Large area VHF plasma production by a balanced power feeding method - Concepedia

Concepedia

Publication | Closed Access

Large area VHF plasma production by a balanced power feeding method

25

Citations

12

References

2007

Year

T. Nishimiya, Yoshinori Takeuchi, Yasuhiro Yamauchi, Hiromu Takatsuka, Takao Shioya, Hiroshi Muta, Yoshinobu Kawai

Thin Solid Films

Plasma ApplicationElectrical EngineeringNonthermal Plasma

References

	Year	Citations

Page 1