Concepedia

Makoto Fukawa

MF

17

Publications

1.3K

Citations

14

H-Index

1997

Active since

Affiliations

Asahi Glass (Japan)(Current)

Tokyo Institute of Technology

Gifu University

Asahi Glass (Belgium)

Makoto Fukawa is an author at Asahi Glass (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsPhotovoltaicsSurface ScienceMicrofabricationSolar CellsMicrostructureNanoelectronics

Publications per year

1997–2013

17

Publications

17

High rate growth of microcrystalline silicon at low temperatures

Michio Kondo, Makoto Fukawa, Lihui Guo et al. · Journal of Non-Crystalline Solids · 2000 · 294 citations

Materials Science, Engineering, Microfabrication +5

Surface OH group governing adsorption properties of metal oxide films

Satoshi Takeda, Makoto Fukawa, Yasuo Hayashi et al. · Thin Solid Films · 1999 · 263 citations

Materials Science, Surface Oh Group, Engineering +7

High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition

Lihui Guo, Michio Kondo, Makoto Fukawa et al. · Japanese Journal of Applied Physics · 1998 · 223 citations

Materials Science, High Rate Deposition, Engineering +11

High rate growth of microcrystalline silicon using a high-pressure depletion method with VHF plasma

Makoto Fukawa, Susumu Suzuki, Lihui Guo et al. · Solar Energy Materials and Solar Cells · 2001 · 107 citations

Materials Engineering, Electrical Engineering, Engineering +12

Role of the hydrogen plasma treatment in layer-by-layer deposition of microcrystalline silicon

K. Saitoh, Michio Kondo, Makoto Fukawa et al. · Applied Physics Letters · 1997 · 64 citations

Materials Science, Chemical Engineering, Hydrogen Plasma Treatments +14

Rows per page

1–5 of 17