Publication | Closed Access
High rate growth of microcrystalline silicon using a high-pressure depletion method with VHF plasma
107
Citations
6
References
2001
Year
Materials EngineeringElectrical EngineeringEngineeringMicrofabricationNanoelectronicsApplied PhysicsHigh Rate GrowthSemiconductor Device FabricationMicrocrystalline SiliconGas Discharge PlasmaSilicon On InsulatorMicroelectronicsPlasma ProcessingVhf PlasmaMicrostructure
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