Concepedia

IVA-8 heteroepitaxial growth of cubic silicon carbide on foreign substrates

H. Matsunami, S. Nishino, H. Ono

IEEE Transactions on Electron Devices · 1981 · 110 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesHeteroepitaxial GrowthHeteroepitaxyHeterostructuresSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Crystal Growth