Thin Solid Films · 2008 · 47 citations · 31 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsSurface ScienceThin FilmsAtomic Layer DepositionFluidized Bed ReactorsMetal Oxide NanomaterialsPacked Bed ReactorsThin-film DepositionThin-film MaterialsAtomic Layer Deposition KineticsAtomic Layer Deposition PrecursorsDeposition TechniquesFluidized-bed Reactor DesignLow-temperature DepositionOxide Film FormationThin-film Growth Kinetics
31
On the optical band gap of zinc oxide
V. Srikant, David R. Clarke · Journal of Applied Physics · 1998 · 1.5K citations
Surface Chemistry for Atomic Layer Growth
Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 676 citations
Atomic layer deposition of transition metals
Booyong S. Lim, Antti Rahtu, Roy G. Gordon · Nature Materials · 2003 · 656 citations
Natural Sciences, Materials Engineering, Materials Science +11