Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy

Abstract

This paper describes a method for fabricating microfluidic devices in a photodefinable epoxy (SU-8). This technique is compatible with, and complementary to, conventional fabrication techniques. It allows microstructures formed in SU-8 to be bonded to produce sealed microfluidic channels. A micromixer fabricated entirely in SU-8, using this technique, for performing liquid-phase reactions is shown to be suitable for visible spectroscopy. This fabrication method also allows the incorporation of materials that are often difficult to integrate. By fabricating hybrid devices that incorporate quartz windows, we demonstrate that these devices are compatible with organic solvents and that in situ ultraviolet detection in a microfluidic system is possible.