Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 43 citations · 6 references
Natural SciencesMaterials ScienceElectronic MaterialsPlasma PhysicsSemiconductor DevicesIon ImplantationImplantation-induced Defect FormationIon Implantation EffectsShallow Junction FormationUltra-shallow Junction Engineering
6
A Monte Carlo computer program for the transport of energetic ions in amorphous targets
J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations
Engineering, Materials Science, Physics +16
Implantation and transient B diffusion in Si: The source of the interstitials
D. J. Eaglesham, P.A. Stolk, H.-J. Gossmann et al. · Applied Physics Letters · 1994 · 541 citations
Engineering, Materials Engineering, Materials Science +17
Surface modification with gas cluster ion beams
Isao Yamada, W. L. Brown, J.A. Norhby et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 103 citations
Natural Sciences, Materials Engineering, Materials Science +14
Composition and structure of the native Si oxide by high depth resolution medium energy ion scatering
A. Al-Bayati, Kevin Orrman-Rossiter, Jaap van den Berg et al. · Surface Science · 1991 · 83 citations
Natural Sciences, Materials Engineering, Materials Science +9
Ion implantation from the past and into the future
S. Moffatt · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 31 citations
Engineering, Biomedical Engineering, Embryology +6