A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases - Concepedia

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A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases

17

Citations

7

References

2009

Year

Hao Lei, Keisuke Ichikawa, Y. Hoshi, Meihan Wang, Takayuki Uchida, Yutaka Sawada

Thin Solid Films

Materials ScienceEngineeringSurface ScienceApplied PhysicsIto FilmsKr GasesThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingOrganic Layer

References

	Year	Citations

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