Concepedia

Comparative study on structure and internal stress in tin-doped indium oxide and indium-zinc oxide films deposited by r.f. magnetron sputtering

T. Sasabayashi, Norihiro Ito, E. Nishimura, Masato Kon, Pung Keun Song, K. Utsumi, Akira Kaijo, Yuzo Shigesato

Thin Solid Films · 2003 · 156 citations · 10 references

References

10

Evaporated Sn-doped In2O3 films: Basic optical properties and applications to energy-efficient windows

I. Hamberg, C. G. Granqvist · Journal of Applied Physics · 1986 · 2.3K citations

Natural Sciences, Chemistry, Materials Engineering +17

Stress-related effects in thin films

John A. Thornton, David W. Hoffman · Thin Solid Films · 1989 · 1.1K citations

Natural Sciences, Materials Engineering, Materials Science +14

Thermalization of sputtered atoms

Kevin Meyer, Iván K. Schuller, Charles M. Falco · Journal of Applied Physics · 1981 · 245 citations

Natural Sciences, Materials Science, Physics +17

Study of the effect of Sn doping on the electronic transport properties of thin film indium oxide

Yuzo Shigesato, David C. Paine · Applied Physics Letters · 1993 · 193 citations

Natural Sciences, Materials Science, Physics +17

Energetic binary collisions in rare gas plasmas

R. S. Robinson · Journal of Vacuum Science and Technology · 1979 · 156 citations

Natural Sciences, Physics, Molecular Physics +14