Concepedia

Takeo Nakano

TN

Statistics

Publications

13

Citations

265

H-Index

11

Active since

1997

Affiliations

Seikei University(Current)

Takeo Nakano is an author at Seikei University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsThin FilmsSurface ScienceMaterials EngineeringElectrical EngineeringPulse PowerAtomic Physics

Publications per year

1997–2016

13

Publications

13

Gas pressure effects on thickness uniformity and circumvented deposition during sputter deposition process

Takeo Nakano, Shigeru Baba · Vacuum · 2005 · 30 citations

Materials Engineering, Materials Science, Engineering +10

Effect of background gas environment on oxygen incorporation in TiN films deposited using UHV reactive magnetron sputtering

Takeo Nakano, Ken'ichiroh Hoshi, Shigeru Baba · Vacuum · 2008 · 29 citations

Materials Science, Tin Films, Engineering +10

Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and deposited film structure

Takeo Nakano, Norihiko Hirukawa, Shuhei Saeki et al. · Vacuum · 2012 · 29 citations

Engineering, Physics, Applied Physics +6

Effect of the target bias voltage during off-pulse period on the impulse magnetron sputtering

Takeo Nakano, Chieko Murata, Shigeru Baba · Vacuum · 2010 · 26 citations

Electrical Engineering, Target Bias Voltage, Engineering +3

Precise determination of the refractive index of sputtered MgO thin films in the visible light range

Shigeru Baba, Isao Mori, Takeo Nakano · Vacuum · 2000 · 24 citations

Materials Science, Engineering, Optical Properties +9

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