Continuous roll-to-flat thermal imprinting process for large-area micro-pattern replication on polymer substrate

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Imprint lithography with sub-10 nm feature size and high throughput

Stephen Y. Chou, Peter R. Krauss · Microelectronic Engineering · 1997 · 373 citations

Engineering, Materials Engineering, Materials Science +13

Roller nanoimprint lithography

Hua Tan, Andrew Gilbertson, Stephen Y. Chou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 313 citations

Engineering, Manufacturing Engineering, Materials Science +9

Stretching DNA in polymer nanochannels fabricated by thermal imprint in PMMA

Lasse Højlund Eklund Thamdrup, Anna Klukowska, Anders Kristensen · Nanotechnology · 2008 · 77 citations

Natural Sciences, Bioengineering, Materials Science +17

Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold

Chih‐Wei Chang, Sen‐Yeu Yang, Long-Sun Huang et al. · Infrared Physics & Technology · 2005 · 76 citations

Engineering, Manufacturing Engineering, Materials Science +11