A simple model explaining the preferential (100) orientation of silicon thin films made by aluminum-induced layer exchange - Concepedia

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A simple model explaining the preferential (100) orientation of silicon thin films made by aluminum-induced layer exchange

49

Citations

11

References

2006

Year

Jens Schneider, Andrey Sarikov, J. Klein, M. Muske, I. Sieber, T.F.J. Quinn, H.S. Reehal, S. Gall, W. Fuhs

Journal of Crystal Growth

Materials ScienceEngineeringPhysicsSimple ModelSilicon On InsulatorSurface ScienceApplied PhysicsSemiconductor Device FabricationAluminum-induced Layer ExchangeThin FilmsChemical Vapor DepositionSilicon Thin FilmsThin Film Processing

References

	Year	Citations

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