Concepedia

Aberration correction and its automatic control in scanning electron microscopes

Shinobu Uno, Kazuhiro Honda, Natsuko Nakamura, Miyuki Matsuya, Joachim Zach

Optik · 2005 · 28 citations · 3 references

DOI

Concepts

References

3

Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM

M. Haider, Stephan Uhlemann, J. Żach · Ultramicroscopy · 2000 · 174 citations

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Aberration correction in a low voltage SEM by a multipole corrector

Joachim Zach, Maximilian Haider · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1995 · 150 citations

, , +10

Field Emission SEM with a Spherical and Chromatic Aberration Corrector

H. Kazumori, Kazuhiro Honda, Miyuki Matsuya et al. · Microscopy and Microanalysis · 2004 · 18 citations

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