An electrostatic servo-type three-axis silicon accelerometer

Abstract

A three-axis capacitive accelerometer using an electrostatic servo system was developed. In this system, the acceleration is decomposed into its axial components independently and simultaneously by using synchronous demodulation. To reduce the off-axis response, an electrostatic force-balancing principle was used in order to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.