Concepedia

Publication | Closed Access

Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

DOI

60

Citations

4

References

1990

Year

S. Suzuki, Shigeki Tuchitani, Katsuhiro Satō, Satoshi Ueno, Yoshiharu Yokota, Masataka Satô, Masayoshi Esashi
Sensors and Actuators A Physical

References

YearCitations

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