Review of Scientific Instruments · 1973 · 47 citations · 1 references
EngineeringElectrical EngineeringAnalog ElectronicsMicroelectromechanical SystemsSensorsCapacitive SensingPressure MeasurementPressure SensorsTransducer PrinciplesTransducer TechnologyCapacitanceCapacitance Measurement TechniquesCapacitive Pressure SensingExcitationOutput CharacteristicsPressure Sensor ResolutionPressure Transducer TechnologyPressure Transducers
A new diode-quad transducer bridge circuit has been developed which features: (1) a high output that is independent of excitation frequency and waveform; (2) a fractional capacitance (ΔC/Co) resolution of 4.4 × 10−8 at a bandwidth of 10–30 Hz; and (3) the capability of conveniently grounding the transducer. Application to a capacitive transducer for pressure measurements yielded an output resolution of 0.003% corresponding to a pressure resolution of ± 1.5 × 10−4 Torr.
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