A high sensitivity CMOS gas flow sensor on a thin dielectric membrane

Thermal sensors based on the seebeck effect

A.W. van Herwaarden, P.M. Sarro · Sensors and Actuators · 1986 · 456 citations

Engineering, Materials Engineering, Materials Science +14

A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

R. G. Johnson, Robert E. Higashi · Sensors and Actuators · 1987 · 141 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Silicon gas flow sensors using industrial CMOS and bipolar IC technology

David Moser, R. Lenggenhager, H. Baltes · Sensors and Actuators A Physical · 1991 · 99 citations

Engineering, Computer Engineering, Electrical Engineering +16

A Microstructure For Measurement Of Thermal Conductivity Of Polysilicon Thin Films

F. Völklein, H. Balles · Journal of Microelectromechanical Systems · 1992 · 98 citations

Engineering, Electrical Engineering, Materials Science +17

Resonating microbridge mass flow sensor

S. Bouwstra, R. Legtenberg, H.A.C. Tilmans · Sensors and Actuators A Physical · 1990 · 92 citations · Full text

Engineering, Chemical Engineering, Instrumentation +6