R. Lenggenhager

Silicon gas flow sensors using industrial CMOS and bipolar IC technology

David Moser, R. Lenggenhager, H. Baltes · Sensors and Actuators A Physical · 1991 · 99 citations

Engineering, Computer Engineering, Electrical Engineering +16

Thermoelectric infrared sensors by CMOS technology

R. Lenggenhager, H. Baltes, Jon Peer et al. · IEEE Electron Device Letters · 1992 · 81 citations

Engineering, Electrical Engineering, Materials Science +17

Thermoelectric infrared sensors in CMOS technology

R. Lenggenhager, H. Baltes, T. Elbel · Sensors and Actuators A Physical · 1993 · 65 citations

Engineering, Electrical Engineering, Materials Science +12

Fabrication and modelling of CMOS microbridge gas-flow sensors

David Moser, R. Lenggenhager, G. Wachutka et al. · Sensors and Actuators B Chemical · 1992 · 59 citations

Engineering, Chemical Engineering, Electrical Engineering +12

Capacitive sensors in CMOS technology with polymer coating

C. Cornila, Andreas Hierlemann, R. Lenggenhager et al. · Sensors and Actuators B Chemical · 1995 · 51 citations

Engineering, Materials Engineering, Materials Science +15