Stress distribution in chemical mechanical polishing - Concepedia

Concepedia

Publication | Closed Access

Stress distribution in chemical mechanical polishing

105

Citations

8

References

1997

Year

C Srinivasa-Murthy, D Wang, Stephen P. Beaudoin, T. Bibby, Karey Holland, T.S. Cale

Thin Solid Films

Materials ScienceStress DistributionEngineeringMaterial ProcessingMechanical EngineeringSolid MechanicsResidual StressSurface PolishingTribocorrosionMechanics Of Materials

References

	Year	Citations

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