Concepedia

Ion beam assisted deposition of substoichiometric silicon nitride

E. P. Donovan, D.R. Brighton, G. K. Hubler, D. Van Vechten

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 25 citations · 6 references

DOI

Concepts

References

6

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

, , +16

Ion Implantation in Semiconductors

L. N. Large · Physics Bulletin · 1971 · 190 citations

, , +15

Modification of niobium film stress by low-energy ion bombardment during deposition

J. J. Cuomo, J. M. E. Harper, C. R. Guarnieri et al. · Journal of Vacuum Science and Technology · 1982 · 160 citations

, , +16

Effects of thermal annealing on the refractive index of amorphous silicon produced by ion implantation

J. E. Fredrickson, C.N. Waddell, W. G. Spitzer et al. · Applied Physics Letters · 1982 · 86 citations

, , +17

Refractive index profiles and range distributions of silicon implanted with high-energy nitrogen

G. K. Hubler, P. R. Malmberg, T. P. Smith · Journal of Applied Physics · 1979 · 34 citations

, , +15