Physics Bulletin · 1971 · 190 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsHigh-frequency Semiconductor DevicesIon ImplantationRadiation Damage In MaterialsSemiconductor DefectsSemiconductor Device MaterialsSilicon MaterialsCharge ControlIon Implantation EffectsRadiation DamageRadiation Damage EffectsSubstrate Temperature EffectsSubstrate Temperature Management
With the considerable interest in ion implantation shown by laboratories throughout the world this textbook is a most welcome review of recent developments in this field. The authors are well known as research workers who have played a significant part in the understanding of the subject that has been achieved in the past few years.