D.R. Brighton

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Active since

1987

Affiliations

United States Naval Research Laboratory(Current)

D.R. Brighton is an author at United States Naval Research Laboratory specializing in materials science, thin-film deposition, and chemical vapor deposition.

Publications per year

1987–1987

Publications

Binary collision cascade prediction of critical ion-to-atom arrival ratio in the production of thin films with reduced intrinsic stress

D.R. Brighton, G. K. Hubler · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 48 citations

Natural Sciences, Materials Science, Physics +15

Ion beam assisted deposition of substoichiometric silicon nitride

E. P. Donovan, D.R. Brighton, G. K. Hubler et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 25 citations

Engineering, Materials Engineering, Materials Science +13

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