Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures

Chienliu Chang, Yeong-Feng Wang, Yoshiaki Kanamori et al. · Journal of Micromechanics and Microengineering · 2005 · 142 citations

Engineering, Electrical Engineering, Physics +17

Shape transformation of silicon trenches during hydrogen annealing

Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 81 citations

Natural Sciences, Materials Engineering, Materials Science +17

On the concentration, focusing, and collimation of x-rays and neutrons using microchannel plates and configurations of holes

S. Wilkins, A. W. Stevenson, K. Nugent et al. · Review of Scientific Instruments · 1989 · 81 citations

Natural Sciences, Nuclear Engineering, Optics +10

Shaped silicon-crystal wafers obtained by plastic deformation and their application to silicon-crystal lenses

Kazuo Nakajima, Kozo Fujiwara, Wugen Pan et al. · Nature Materials · 2004 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +13

Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita et al. · Applied Optics · 2006 · 45 citations

Engineering, Materials Engineering, Materials Science +17