Concepedia

Yeong-Feng Wang

YW

Statistics

Publications

2

Citations

164

H-Index

2

Active since

2004

Affiliations

National Taiwan University(Current)

Yeong-Feng Wang is an author at National Taiwan University specializing in mechanical engineering, engineering, and mechanical systems.

Top concepts

EngineeringMechanical EngineeringPhotonicsCalibrationLaser DesignInterferometryApplied PhysicsInstrumentationOptical SystemsMicroelectronics

Publications per year

2004–2005

2

Publications

2

Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures

Chienliu Chang, Yeong-Feng Wang, Yoshiaki Kanamori et al. · Journal of Micromechanics and Microengineering · 2005 · 142 citations

Electrical Engineering, Engineering, Beam Lithography +14

Design and construction of linear laser encoders that possess high tolerance of mechanical runout

Chih-Kung Lee, Chyan-Chyi Wu, Shih-Jui Chen et al. · Applied Optics · 2004 · 22 citations

High Alignment Tolerance, Engineering, Laser Science +16

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