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Shaped silicon-crystal wafers obtained by plastic deformation and their application to silicon-crystal lenses

Materials ScienceOptical MaterialsEngineeringWafer Scale ProcessingFlexible ElectronicsMicrofabricationSilicon-crystal LensesOptic DesignApplied PhysicsSilicon-crystal WafersSemiconductor Device FabricationPlasticitySilicon On InsulatorMicroelectronicsMicro-optical ComponentPlastic Deformation