Fumiki Kato

Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

Yuichiro Ezoe, Ikuyuki Mitsuishi, Utako Takagi et al. · Microsystem Technologies · 2009 · 54 citations

X-ray Spectroscopy, Health Sciences, Engineering +10

Investigation of low-temperature deposition high-uniformity coverage Parylene-HT as a dielectric layer for 3D interconnection

Tung Thanh Bui, Xiaojin Cheng, Naoya Watanabe et al. · 2014 · 19 citations

Engineering, Thermal Conductivity, Advanced Packaging (Semiconductors) +18

Copper-Filled Through-Silicon Vias With Parylene-HT Liner

Tung Thanh Bui, Naoya Watanabe, Xiaojin Cheng et al. · IEEE Transactions on Components Packaging and Manufacturing Technology · 2016 · 18 citations

Engineering, Organic Electronics, Interconnect (Integrated Circuits) +19

250 °C-Operated sandwich-structured all-SiC power module

Fumiki Kato, Rejeki Simanjorang, Fengqun Lang et al. · Japanese Journal of Applied Physics · 2015 · 14 citations

Electrical Engineering, Power Module, Engineering +12

A novel method of hotspot temperature reduction for a 3D stacked CMOS IC chip device fabricated on an ultrathin substrate

Fumiki Kato, Hiroshi Nakagawa, Masahiro Aoyagi · Journal of Micromechanics and Microengineering · 2013 · 13 citations

Engineering, Oscillator Circuit Film, Htc Film +23