Materials Science and Engineering B · 1999 · 27 citations · 11 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsSemiconductor DevicesChemical Vapor DepositionSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor HeterostructuresCarbide-based MaterialsHeteroepitaxial GrowthSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide CeramicsSilicon Carbide Crystal Growth
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Epitaxial growth and electric characteristics of cubic SiC on silicon
Shigehiro Nishino, H. Suhara, H. Ono et al. · Journal of Applied Physics · 1987 · 215 citations