Concepedia

Influence of thickness and growth temperature on the properties of zirconium oxide films grown by atomic layer deposition on silicon

Kaupo Kukli, Mikko Ritala, Teet Uustare, Jaan Aarik, Katarina Forsgren, Timo Sajavaara, Markku Leskelä, Anders Hårsta

Thin Solid Films · 2002 · 36 citations · 31 references

DOI

Concepts

References

31

Thermodynamic stability of binary oxides in contact with silicon

K. J. Hubbard, Darrell G. Schlom · Journal of materials research/Pratt's guide to venture capital sources · 1996 · 1.2K citations

, , +14

Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare et al. · Journal of Crystal Growth · 1995 · 302 citations

, , +14

Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler et al. · Thin Solid Films · 1999 · 287 citations

, , +16

Formation of Ultrafine Tetragonal ZrO <sub>2</sub> Powder Under Hydrothermal Conditions

Eiji Tani, Masahiro Yoshimura, Shigeyuki Sōmiya · Journal of the American Ceramic Society · 1983 · 283 citations

, , +15

Thermal stability of ultrathin ZrO2 films prepared by chemical vapor deposition on Si(100)

T.S. Jeon, J.M. White, D. L. Kwong · Applied Physics Letters · 2001 · 271 citations

, , +17