Optical methods for micromachine monitoring and feedback

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Surface micromachined microengine

Ernest J. Garcia, Jeffry J. Sniegowski · Sensors and Actuators A Physical · 1995 · 189 citations

In situ friction and wear measurements in integrated polysilicon mechanisms

K.J. Gabriel, F. Behi, R. Mahadevan et al. · Sensors and Actuators A Physical · 1990 · 171 citations

Engineering, Materials Engineering, Materials Science +14

Frictional study of IC-processed micromotors

Yu‐Chong Tai, R.S. Muller · Sensors and Actuators A Physical · 1990 · 126 citations

Engineering, Materials Science, Mechanical Engineering +11