Texture and stress profile in thick polysilicon films suitable for fabrication of microstructures

Novel Process For A Monolithic Integrated Accelerometer

M. Offenberg, Franz Lärmer, B. Elsner et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 121 citations

Engineering, Manufacturing Engineering, Microfabrication +16

Crystalline quality and residual stresses in diamond layers by Raman and x-ray diffraction analyses

D. Rats, L. Bimbault, L. Vandenbulcke et al. · Journal of Applied Physics · 1995 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +16

Design properties of polycrystalline silicon

T. I. Kamins · Sensors and Actuators A Physical · 1990 · 61 citations

Engineering, Materials Engineering, Materials Science +14

A Characterization of the Effect of Deposition Temperature on Polysilicon Properties: Morphology, Dopability, Etchability, and Polycide Properties

E. Ibok, S. Garg · Journal of The Electrochemical Society · 1993 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +17

Stress measurement by microRaman spectroscopy of polycrystalline silicon structures

M.S. Benrakkad, Miguel Ángel Benítez, J. Estéve et al. · Journal of Micromechanics and Microengineering · 1995 · 34 citations

Engineering, Materials Engineering, Materials Science +17