M.S. Benrakkad

Stress measurement by microRaman spectroscopy of polycrystalline silicon structures

M.S. Benrakkad, Miguel Ángel Benítez, J. Estéve et al. · Journal of Micromechanics and Microengineering · 1995 · 34 citations

Engineering, Materials Engineering, Materials Science +17

Stress-profile characterization and test-structure analysis of single and double ion-implanted LPCVD polycrystalline silicon

Miguel Ángel Benítez, L. Fonseca, J. Estéve et al. · Sensors and Actuators A Physical · 1996 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +16

Stress gradient and structural properties of atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors

M.S. Benrakkad, J.M. López-Villegas, Josep Samitier et al. · Sensors and Actuators A Physical · 1995 · 12 citations

Engineering, Materials Engineering, Materials Science +17

Stress Profile Characterization And Test Structures Analysis Of Single And Double Ion Implanted LPCVD Polycrystalline Silicon

Miguel Ángel Benítez, J. Estéve, M.S. Benrakkad et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 10 citations

Engineering, Materials Engineering, Materials Science +12