Concepedia

Publication | Closed Access

Digital moiré fringe measurement method for alignment in imprint lithography

DOI

37

Citations

15

References

2011

Year

Jinyou Shao, Yucheng Ding, Hongmiao Tian, Xin Li, Xiangming Li, Hongzhong Liu
Optics & Laser Technology

References

YearCitations

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